Increased environmental awareness in the industry combined with the globalized market economy makes increasing demands for sustainable and efficient resource utilization. In this context, maintenance plays a critical role by linking business objectives to the strategic and operational activities aimed at retaining the system’s availability performance, cost-efficiency and sustainability. Performing maintenance effectively and efficiently requires corresponding infrastructure for decision-support provided through eMaintenance solutions. A proper eMaintenance solution needs to provide services for data acquisition, data processing, data aggregation, data analysis, data visualization, context-sensing etc. To en Quality of Service (QoS) in eMaintenance solutions, the performance of both system-of-interest, enabling systems and related processes have to be measured and managed. However, the QoS has to be considered on all aggregation levels and encompass the aspects of Content Quality (CQ), Data Quality (DQ) and Information Quality (IQ). Hence, the purpose of this paper is to study and describe some aspects of DQ in eMaintenance related to process industry in northern Europe.