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Computational studies of the HWCVD deposition process during amorphous and nanocrystalline silicon films
Nurni, Viswanathan
Adhikari, Subhra
Dusane, R.O.
2006 (English)
Conference paper, Presentation (Refereed)
Place, publisher, year, edition, pages
2006.
Identifiers
URN:
urn:nbn:se:ltu:diva-35695
Local ID: a57a9d0f-df60-4860-b3d9-b1b673a0abbf
OAI: oai:DiVA.org:ltu-35695
DiVA:
diva2:1008948
Conference
International Conference on HWCVD (Cat-CVD) Processes : 04/10/2006 - 08/10/2006
Note
Upprättat; 2006; 20130205 (andbra)
Available from:
2016-09-30
Created:
2016-09-30
Bibliographically approved
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