The analysis of coatings is usually performed with techniques such as X-Ray diffraction (XRD), scanning electron microscope (SEM), etc. The Raman technique is here investigated as another technique for the analysis and characterisation of the TiAlN and Al₂O₃/TiCN coatings. 

The efficiency of the Raman spectroscopy to measure the residual stresses within the coatings is compared with the Raman peak positions or “Raman shift” (qualitative measure) and the numerical values of residual stresses obtained through XRD (quantitative measure). 

In addition, the performance of the Raman technique to measure the disorder/crystallinity of the lattice is evaluated by comparing the Raman bandwidth with the one obtained through XRD. 

Also, some tests were carried out to identify the nature of the oxides present in the coatings, if any. 

Finally, the various layers staked altogether composing a multilayer coating, could be analysed and then compared with fractography analysis. 

As an overview, the Raman spectroscopy, if used to characterise the TiAlN and Al₂O₃/TiCN coatings made through PVD or CVD, is not yet an alternative technique but only a complementary to well-known ones.