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Excimer laser processing of ferrite video heads
Forschungsinstitut für Hochleistungsstrahltechnik, University of Technology, Vienna.
Forschungsinstitut für Hochleistungsstrahltechnik, University of Technology, Vienna.
1996 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 106, no 2, p. 374-378Article in journal (Refereed) Published
Abstract [en]

The technology of pulsed excimer laser ablation for processing ferrite video heads at 248 nm KrF laser radiation was studied. Using the mask imaging technique two trapezoids were projected onto the surface of the samples producing laser-etched grooves with a depth of approximately 45 μm. A sufficiently sharp contour of the trapezoids was achieved at the workpiece. Since the variations of the critical dimensions with respect to depth were outside the tolerance range the sample was slightly tilted to compensate for the beam divergence and to obtain parallel edges of the trapezoidal grooves with an error of less than 5 μm over the whole depth of the cavities. Micrographs of the samples showed that the surfaces of the laser-etched video heads were covered with ablated material and small droplets of resolidified material. These sediments can be removed easily by a slight polishing of the surface. For the experiments a typical fluence of 5 J/cm2 was used which allowed etch rates of 50 nm per pulse. The work showed that excimer lasers are useful tools for the precise micromachining of ferrite video heads.

Place, publisher, year, edition, pages
1996. Vol. 106, no 2, p. 374-378
National Category
Manufacturing, Surface and Joining Technology
Research subject
Manufacturing Systems Engineering
Identifiers
URN: urn:nbn:se:ltu:diva-2864DOI: 10.1016/S0169-4332(96)00419-9Local ID: 094f4100-c276-11db-9ea3-000ea68e967bOAI: oai:DiVA.org:ltu-2864DiVA, id: diva2:975718
Note
Upprättat; 1996; 20070222 (cira)Available from: 2016-09-29 Created: 2016-09-29 Last updated: 2017-11-24Bibliographically approved

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Kaplan, Alexander

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