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14N(α,p)17O nuclear reaction cross-section at 4.9-6.1 MeV
INFN Laboratori Nazionali di Legnaro.
INFN Laboratori Nazionali di Legnaro.
INFN Laboratori Nazionali di Legnaro.
INFN Laboratori Nazionali di Legnaro.
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2005 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 240, no 4, p. 803-809Article in journal (Refereed) Published
Abstract [en]

The 14N(α,p)17O nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle θ = 172° in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work. © 2005 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2005. Vol. 240, no 4, p. 803-809
Keywords [en]
N(α, p)O cross-section, Nitrogen depth profiling
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Other Physics Topics
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Experimental Physics
Identifiers
URN: urn:nbn:se:ltu:diva-8642DOI: 10.1016/j.nimb.2005.06.213ISI: 000233712900003Scopus ID: 2-s2.0-27744434728Local ID: 72a0199e-8dbf-4e10-89a9-42995f927ef7OAI: oai:DiVA.org:ltu-8642DiVA, id: diva2:981580
Note

Upprättat; 2005; 20141216 (albvom)

Available from: 2016-09-29 Created: 2016-09-29 Last updated: 2018-10-04Bibliographically approved

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Vomiero, Alberto

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