A Fully Additive Fabrication Approach for sub-10-Micrometer Microvia Suitable for 3-D System-in-Package IntegrationShow others and affiliations
2023 (English)In: Proceedings - IEEE 73rd Electronic Components and Technology Conference, ECTC 2023, Institute of Electrical and Electronics Engineers Inc. , 2023, p. 1926-1931Conference paper, Published paper (Refereed)
Abstract [en]
The semiconductor industry demands high input/output (I/O) density, requiring sub-l0-micrometer microvia. Here we propose a novel, fully additive, economical approach for creating and copper plating of microvias. The experimental process consisted of three stages. In Stage I, a polyurethane layer was spin-coated onto a FR-4 PCB base, followed by target copper layer deposition using the sequential build-up-covalent bonded metallization (SBU -CBM) method. In Stage II, first another layer of polyurethane was spin-coated on the top of the target copper layer, and then a microvia was created on the polyurethane layer using a picosecond pulsed ultraviolet (UV) laser. Finally, in Stage III, the SBU-CBM method was used to selectively copper plating of the microvia. Optical microscopy and cross-section scanning electron microscopy (SEM) images confirmed the successful formation and copper plating of sub-l0 micrometer microvia.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers Inc. , 2023. p. 1926-1931
Series
Proceedings - Electronic Components Conference, ISSN 0569-5503, E-ISSN 2377-5726
Keywords [en]
additive manufacturing, copper plating, microvia, picosecond pulsed ultraviolet laser
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Cyber-Physical Systems
Identifiers
URN: urn:nbn:se:ltu:diva-101103DOI: 10.1109/ECTC51909.2023.00331ISI: 001047624100317Scopus ID: 2-s2.0-85168309275ISBN: 979-8-3503-3499-9 (print)ISBN: 979-8-3503-3498-2 (electronic)OAI: oai:DiVA.org:ltu-101103DiVA, id: diva2:1792728
Conference
73rd IEEE Electronic Components and Technology Conference, ECTC 2023, Orlando, United States, May 30 - June 2, 2023
Funder
Interreg Nord2023-08-302023-08-302025-10-21Bibliographically approved