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A Fully Additive Fabrication Approach for sub-10-Micrometer Microvia Suitable for 3-D System-in-Package Integration
Luleå University of Technology, Department of Computer Science, Electrical and Space Engineering, Embedded Internet Systems Lab.
Luleå University of Technology, Department of Computer Science, Electrical and Space Engineering, Embedded Internet Systems Lab.ORCID iD: 0000-0002-6055-3198
Microelectronics Research Unit, University of Oulu, Oulu, Finland.
Materials and Mechanical Engineering Research Unit, University of Oulu, Oulu, Finland.
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2023 (English)In: Proceedings - IEEE 73rd Electronic Components and Technology Conference, ECTC 2023, Institute of Electrical and Electronics Engineers Inc. , 2023, p. 1926-1931Conference paper, Published paper (Refereed)
Abstract [en]

The semiconductor industry demands high input/output (I/O) density, requiring sub-l0-micrometer microvia. Here we propose a novel, fully additive, economical approach for creating and copper plating of microvias. The experimental process consisted of three stages. In Stage I, a polyurethane layer was spin-coated onto a FR-4 PCB base, followed by target copper layer deposition using the sequential build-up-covalent bonded metallization (SBU -CBM) method. In Stage II, first another layer of polyurethane was spin-coated on the top of the target copper layer, and then a microvia was created on the polyurethane layer using a picosecond pulsed ultraviolet (UV) laser. Finally, in Stage III, the SBU-CBM method was used to selectively copper plating of the microvia. Optical microscopy and cross-section scanning electron microscopy (SEM) images confirmed the successful formation and copper plating of sub-l0 micrometer microvia.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers Inc. , 2023. p. 1926-1931
Series
Proceedings - Electronic Components Conference, ISSN 0569-5503, E-ISSN 2377-5726
Keywords [en]
additive manufacturing, copper plating, microvia, picosecond pulsed ultraviolet laser
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Cyber-Physical Systems
Identifiers
URN: urn:nbn:se:ltu:diva-101103DOI: 10.1109/ECTC51909.2023.00331ISI: 001047624100317Scopus ID: 2-s2.0-85168309275ISBN: 979-8-3503-3499-9 (print)ISBN: 979-8-3503-3498-2 (electronic)OAI: oai:DiVA.org:ltu-101103DiVA, id: diva2:1792728
Conference
73rd IEEE Electronic Components and Technology Conference, ECTC 2023, Orlando, United States, May 30 - June 2, 2023
Funder
Interreg NordAvailable from: 2023-08-30 Created: 2023-08-30 Last updated: 2025-10-21Bibliographically approved

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Imani, RoghayehChouhan, ShaileshDelsing, Jerker

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